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*CAUTION: This material reacts violently with aluminum and white metals and this material is not be used for vapor degreasing (contains less than 0
orgで。初版は2001年11月に発行された。
This Standard is intended to set levels of specification for glass substrates to insure repeatable manufacture of flat panel displays and uniformity of substrates from all vendors
SEMI C27-0118 (technical revision)
This standard was developed to address a North American need for a common set of requirements for specifying
C00334 - SEMI C3.34 - Specification for Disilane (Si2H6) in Cylinders, 97% Quality Revision:SEMI C3.34-92 - Superseded *CAUTION: This material reacts violentlyThe purpose of this Standard is to provide a specification for disilane (Si2H6) used in the semiconductor industry. This Standard covers requirements for disilane (Si2H6) used in the semiconductor industry. If analytical methods are not complete, the requirements are presented as a guideline. Referenced SEMI Standards (purchase separately) SEMI C3 Specification for Gases Revision History SEMI C3. 34 0116 (Reapproved 0922) SEMI C3. 34 0116 (technical
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